Near-field infrared imaging with a microfabricated solid immersion lens
نویسندگان
چکیده
We report imaging in the infrared with a microfabricated solid immersion lens. The integrated 15-mm-diameter lens and cantilever are fabricated from single-crystal silicon and scanned in contact with a sample to obtain an image. We demonstrate a focused spot size of l/5 and an effective numerical aperture of 2.5 with l59.3 mm light. The total power transmitted through the lens is a factor of 10 greater than through a metal aperture giving the same spatial resolution. Two 1.0 mm holes in a metal film separated by 3.0 mm are imaged with the solid immersion lens in transmission and shown to be resolved. © 2000 American Institute of Physics. @S0003-6951~00!05239-6#
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